photo:FEI quanta 3D

The Quanta™ 3D DualBeam™ FEG FIB-SEM combines a Focused Ion Beam (FIB) with a high-resolution Field Emission Gun Scanning Electron Microscope (FEG-SEM). This combination provides enhanced 2D and 3D materials characterization and analysis for a wide range of samples. A focused Ga Ion beam allows for micro and nano-scale cutting of material during TEM sample preparation, EBSD surface milling, and automated milling scripts for micro-pillar patterns. Additionally, the FIB provides a “slice and view” technique that allows for 3D reconstruction of a sample, providing the ability to image and analyze subsurface features. Featuring three imaging modes – high vacuum, low vacuum and ESEM, it accommodates the widest range of samples of any SEM system. The Quanta 3D FEG’s novel, field-emission electron source delivers clear and sharp electron imaging and increased electron beam current enhances EDS and EBSD analysis. The integrated EDAX Pegasus EDS & EBSD system brings new capabilities and flexibility to engineers and researchers needing chemical composition analysis, element distribution, crystallographic orientation, grain size and distribution etc.


Main Capabilities

High-resolution SEM imaging with environmental control

Specimen etching or deposition

Precise circuit modification/nanofabrication

Micro/nano-scale patterning

TEM sample preparation by combining FIB milling and Omniprobe lift-off process

Elemental analysis and mapping

Crystallographic analysis and mapping


Field emission electron source with probe current adjustable up to 36nA

Beam acceleration voltages: 500V-30KV

High vacuum, low vacuum and ESEM imaging modes

Spatial resolution: 1.3nm in second electron imaging and 1.7 in ion beam imaging

Motorized 5 axis specimen stage

Solid state backscattering electron detector

EDAX Pegasus EDS/EBSD detectors