ThermoScientific Helios G5 CXe Plasma FIB

The Helios 5 is a DualBeam focused ion beam microscope (FIB). It has an electron column for ultra-high-resolution scanning electron microscopy (SEM) tasks and a xenon (Xe) plasma ion column for sample preparation for TEM and atom probe tomography (APT), as well as for 3D characterization of materials.

Use of the Auto Slice & View software in combination with our Oxford Instruments Ultim®Max energy dispersive X-ray spectrometer (EDS) and/or Oxford Instruments Symmetry® Electron Backscatter Diffraction (EBSD) detector allows fully-automated multi-modal materials characterization workflows.

Main Features

  • Available detectors:
    • in-lens SE/BSE detector (TLD)
    • Everhart-Thornley SE detector (ETD)
    • in-chamber electron & ion detector (ICE) for secondary ions (SI) and electrons (SE)
    • retractable STEM 3+ detector (BF/DF/HAADF segments)
  • Flexible 5-axis motorized stage:
    • tilt range: -15° to 90°
    • max. weight: 500g in any stage position, 5kg at 0° tilt
  • Oxford Instruments Ultim®Max energy dispersive X-ray spectrometer (EDS)
  • Oxford Instruments Symmetry® Electron Backscatter Diffraction (EBSD) detector
  • MultiChem™ Gas Injection System (GIS) for Pt, W and C deposition
  • EasyLift™ NanoManipulator for in situ sample manipulation

Automation

  • Auto Slice & View for 3D material characterization by FIB serial sectioning and analysis using EBSD and/or EDS, follwed by advanced 3D visualization with the Avizo™ software available on our data processing and analysis workstation
  • AutoTEM for automated TEM specimen preparation
  • iFast Developer software for creating individual FIB/SEM automation workflows

Specifications

Resolution

  • Electron beam: 0.6 nm at 30 kV (STEM)
  • Electron beam: 0.6 nm at 15 kV
  • Ion beam: 4.0 nm at 30 kV (preferred statistical method)
  • Ion beam: 2.5 nm at 30 kV (selective edge method)

Beam parameters

  • Electron beam current range: 0.8 pA to 176 nA
  • Electron accelerating voltage range: 200 V – 30 kV
  • Ion beam current range: 1 pA – 100 nA
  • Ion beam accelerating voltage range: 500 V – 30 kV

 

 

ThermoFisher Helios G5 CXe PFIBHelios G5 CXe PFIB at LSU SIF

 

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